Process demonstration of 300 mm die stacking
(D2W FC Bonding)
- Die per wafer: 120
- Die size: 20.4 x 20.4 mm
- SnAg-cap on Cu-pillar
- Bump pitch: 55µm
- Bump height: 25µm
- Bump diameter: 25µm
- Bump per die: 143.616
- Bump per wafer: 20.967.936